APPARATUS FOR INSPECTING ELECTRON BEAM AND METHOD FOR INSPECTING OPERATION STATE THEREOF TO SHORTEN TIME INTERVAL REQUIRED FOR INSPECTING OPERATION STATE OF ELECTRON BEAM INSPECTING APPARATUS AND IMPROVE THROUGHPUT OF ELECTRON BEAM INSPECTING PROCESS

摘要

PURPOSE: A method for inspecting an operation state of an electron beam inspecting process is provided to shorten a time interval required for inspecting an operation state of an electron beam inspecting apparatus and improve throughput of an electron beam inspecting process by easily checking the operation state of the electron beam inspecting apparatus and by eliminating the necessity of repeatedly performing an operation state inspecting process. CONSTITUTION: Inspection regions previously set up on a substrate(10) are sequentially scanned by an electron beam(20) along a plurality of scanning lines. Secondary electrons discharged from the plurality of scanning lines are detected. Inspection images corresponding to the plurality of scanning lines are acquired from the detected secondary electrons. The inspection images are analyzed by using initial sensitivity to form an inspection graph corresponding to the number of defects on the plurality of scanning lines. The inspection graph is compared with a reference graph.