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Stable lithium niobate waveguide devices, and methods of making and using same

机译:稳定的铌酸锂波导器件及其制造和使用方法

摘要

Embodiments of the present invention provide stable lithium niobate waveguide devices, and methods of making and using the same. A lithium niobate-based waveguide device may include a Z-cut lithium niobate substrate having upper and lower surfaces, an optical waveguide embedded within the lithium niobate substrate, a signal electrode disposed on the upper surface of lithium niobate substrate and parallel to the optical waveguide, guard electrodes disposed on the upper surface of the lithium niobate substrate and flanking but spaced apart from the signal electrode, and a conductive layer on the lower surface of the lithium niobate substrate, wherein the conductive layer serves as a common ground reference for the signal and guard electrodes.
机译:本发明的实施方式提供了稳定的铌酸锂波导器件及其制造和使用方法。基于铌酸锂的波导装置可以包括:具有上表面和下表面的Z切铌酸锂衬底;嵌入在所述铌酸锂衬底内的光波导;布置在所述铌酸锂衬底的上表面上并与所述光波导平行的信号电极。 ,设置在铌酸锂基板的上表面上并与信号电极隔开但侧向隔开的保护电极以及在铌酸锂基板的下表面上的导电层,其中该导电层用作信号的公共接地参考和保护电极。

著录项

  • 公开/公告号US9020306B2

    专利类型

  • 公开/公告日2015-04-28

    原文格式PDF

  • 申请/专利权人 THE AEROSPACE CORPORATION;

    申请/专利号US201313830777

  • 发明设计人 HEINRICH G. MULLER;ANDREW D. STAPLETON;

    申请日2013-03-14

  • 分类号G02F1/035;G02F1/01;

  • 国家 US

  • 入库时间 2022-08-21 15:17:51

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