ORGANOAMINOSILANE PRECURSOR AND METHOD FOR PREPARING AND USING SAME

摘要

The present invention relates to an organoaminosilane precursor which can be used to deposit a silicon-containing film containing silicon and to a method for preparing the precursor. Also, the present invention relates to the silicon-containing film or a deposition method to prepare the silicon-containing film by using the organoaminosilane precursor. Moreover, the present invention relates to a container comprising the organoaminosilane precursor or a composition thereof which can be used to transmit the precursor to a reactor to deposit the silicon-containing film.;COPYRIGHT KIPO 2015