ORGANOAMINOSILANE PRECURSOR AND A METHOD FOR PREPARING AND USING THE SAME

摘要

PURPOSE: An organoaminosilane precursor and a method for preparing the same are provided to deposit and prepare a silicone-containing film.;CONSTITUTION: Organoaminosilane is denoted by chemical formula A, B, or C. The organoaminosilane is N-silyl pyrrole, N-silyl-2,5-dimethypyrrole, or 1-silyl-7-azaindole. The organoaminosilane is 2,6-dimethylmorpolysilane, 2-methytl pyrrolodinosilane, or N-silyldecahydroquinoline. A composition for depositing a silicone-containing film contains: organoaminosilane or a mixture thereof; and a solvent of ether, tertiary amine, nitrile, alkyl hydrocarbon, aromatic hydrocarbon, tertiary amino ether, or a mixture thereof. A method for preparing the silicone-containing film comprises: a step of placing a substrate on a reactor of ~700 Deg.C. and 1 Torr or less; a step of introducing one or more organoaminosilane or the mixture thereof into the reactor; and a step of partially reacting one or more organoaminosilane and precursor and depositing the silicone-containing film on the substrates.;COPYRIGHT KIPO 2013