CZTS Fabrication Method of CZTS Thin Films using one-step sputtering and its application to Thin Film Solar Cells and Thin Film Solar Cells

摘要

The present invention relates to a CZTS thin film manufacturing method using a single process in which a CZTS single target having a specific composition is formed as a CZTS thin film on a substrate using a single process sputtering process, a thin film solar cell manufacturing method using the same, and a thin film solar cell. A method of manufacturing a CZTS thin film using a single process of the present invention includes: a substrate placing step of placing a substrate in a sputtering apparatus; And a CZTS thin film deposition step of depositing a CZTS thin film on the substrate by sputtering a CZTS single target by single process sputtering.