THERMAL ACID GENERATOR BOUND MONOMER AND POLYMER OBTAINED FROM THE THERMAL ACID GENERATOR BOUND MONOMER AND THERESIST UNDERLAYERCOMPOSITION INCLUDING THE POLYMER AND METHOD OF FORMING PATTERNS USING THE RESIST UNDERLAYERCOMPOSITION

摘要

A polymer obtained from the thermal acid generator bonding monomer, a composition for a resist underlayer film containing the polymer, and a pattern forming method using the composition for a resist underlayer film. [Chemical Formula 1] In Formula 1, A, L, R ¹ , R ² And n are as defined in the specification.