3 METHODS OF FABRICATING THREE-DIMENSIONAL CAPACITOR STRUCTURES HAVING PLANAR METAL-INSULATOR-METAL AND VERTICAL CAPACITORS THEREIN

摘要

planar metal-insulator-production method of the three-dimensional capacitor structure having a metal capacitor and a vertical capacitor is provided . On the production method of the three-dimensional capacitor structure is a substrate, forming a first horizontal MIM capacitors, and on the first horizontal MIM capacitors, a first forming an interlayer insulating layer, in the first insulating layer, a first forming vertical capacitor electrode, and the image on the first interlayer insulating layer, to form a second horizontal MIM capacitor, forming the second horizontal MIM capacitor by the first vertical capacitor electrodes, the first horizontal MIM capacitors forming an upper capacitor electrode electrically connected to the upper capacitor electrode, in the first interlayer insulating layer, it includes forming the elongated bottom capacitor electrode so as to resist to the upper electrode of the first and second horizontal MIM capacitors . ; flat metal-insulator-metal capacitors, vertical capacitors