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SYSTEM FOR COATING APPLICATION BASE OF INVERSE LITHOGRAPHY WITH SUBSTRATE HOLDER OPTIMISED IN DENSITY OF HIGH-INTENSITY INVERSE LITHOGRAPHY (HULA) IN CONICAL CHAMBER OF DEPOSITION
SYSTEM FOR COATING APPLICATION BASE OF INVERSE LITHOGRAPHY WITH SUBSTRATE HOLDER OPTIMISED IN DENSITY OF HIGH-INTENSITY INVERSE LITHOGRAPHY (HULA) IN CONICAL CHAMBER OF DEPOSITION
FIELD: process engineering.;SUBSTANCE: invention relates to deposition of material on substrate with application of inverse lithography process. Proposed device comprises conical housing with dome-like top, deposition source, central dome-like element arranged above deposition source and nearby dome-like top. Central dome-like element is arranged at first axis aligned with dome-like top to turn about central point. One or several orbital dome-shape elements are arranged above deposition source, nearby dome-like top, and at equal distance in radial direction of central point to turn about first axis and second axis at a time. Said second axis extends through central point of orbital dome-like element. Said orbital elements feature equal diameter and concavity as dome-like central element. Mask is arranged between deposition source and central dome-like element to engage with said central element. Central dome-like element and every orbital dome-like element comprise one or several substrate mounts arranged inside every orbital elements and central element to feed substrates inside.;EFFECT: higher quality.;19 cl, 7 dwg, 4 tbl, 2 ex
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机译:技术领域本发明涉及利用逆光刻工艺在衬底上沉积材料。所提出的装置包括具有圆顶状顶部的圆锥形壳体,沉积源,布置在沉积源上方的中央圆顶状元件以及附近的圆顶状顶部。中心圆顶状元件布置在与圆顶状顶部对准的第一轴线处,以绕中心点转动。一个或几个轨道穹顶形元件布置在沉积源上方,附近的穹顶状顶部上,并且在中心点的径向方向上的距离相等,以一次绕第一轴和第二轴旋转。所述第二轴线延伸穿过轨道圆顶状元件的中心点。所述轨道元件具有与圆顶状中心元件相同的直径和凹度。掩模布置在沉积源和中央圆顶状元件之间以与所述中央元件接合。中央圆顶状元件和每个轨道圆顶状元件均包含一个或多个基板底座,这些基板底座布置在每个轨道元件和中央元件内部,以向内部送入基板。;效果:更高的质量; 19 cl,7 dwg,4 tbl,2 ex
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