Use of radial basis function networks and hyper-cubes for deviation classification in semiconductor processing equipment

摘要

A method and system for analyzing data comprising generating a first node, determining a first hypercube for the first node, and determining whether a pattern is within the first hypercube. If the pattern is not within the first hypercube, the method includes determining if the pattern is within a first hyperspheres, the first hyperspheres having a radius equal to a diagonal of the first hypercube.