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Classification of deviations in semiconductor processing equipment using radial basis function networks and hypercubes
Classification of deviations in semiconductor processing equipment using radial basis function networks and hypercubes
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机译:使用径向基函数网络和超立方体对半导体加工设备中的偏差进行分类
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摘要
A method and system for analysis of data, including creating a first node, determining a first hyper-cube for the first node, determining whether a sample resides within the first hyper-cube. If the sample does not reside within the first hyper-cube, the method includes determining whether the sample resides within a first hyper-sphere, wherein the first hyper-sphere has a radius equal to a diagonal of the first hyper-cube.
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