Classification of deviations in semiconductor processing equipment using radial basis function networks and hypercubes

摘要

Data comprising: creating a first node; determining a first hypercube of the first node; and determining whether a sample is present in the first hypercube. Method and system for analysis. If the sample is not in the first hypercube, the method includes determining whether the sample is in a first hypersphere having a radius equal to the diagonal of the first hypercube. . [Selection] Figure 2