- USING RADIAL BASIS FUNCTION NETWORKS AND HYPER-CUBES FOR EXCURSION CLASSIFICATION IN SEMI-CONDUCTOR PROCESSING EQUIPMENT

摘要

A method and system for data analysis includes generating a first node, determining a first hyper-cube for the first node, and determining whether a sample is within the first hyper-cube. If the sample is not in the first hyper-cube, the method includes determining if the sample is in the first hyper-sphere, wherein the first hyper sphere has the same radius as the diagonal of the first hyper-cube.