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SYSTEMS AND METHODS FOR FORMING SOLAR CELLS WITH CuInSe2 AND Cu(In,Ga)Se2 FILMS

机译:用CuInSe2和Cu(In,Ga)Se2薄膜形成太阳能电池的系统和方法

摘要

Systems and methods for solar cells with CIS and CIGS films made by reacting evaporated copper chlorides with selenium are provided. In one embodiment, a method for fabricating a thin film device comprises: providing a semiconductor film comprising indium (In) and selenium (Se) upon a substrate; heating the substrate and the semiconductor film to a desired temperature; and performing a mass transport through vapor transport of a copper chloride vapor and se vapor to the semiconductor film within a reaction chamber.
机译:提供了具有通过蒸发的氯化铜与硒反应制成的具有CIS和CIGS膜的太阳能电池的系统和方法。在一个实施例中,一种用于制造薄膜器件的方法包括:在基板上提供包括铟(In)和硒(Se)的半导体膜;以及在半导体衬底上形成半导体膜。将基板和半导体膜加热到期望的温度;通过将氯化铜蒸气和硒蒸气蒸气输送到反应室内的半导体膜来进行质量输送。

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