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Method of manufacturing a dicing sheet and the chip with the protective film forming layer

机译:切割片和具有保护膜形成层的芯片的制造方法

摘要

PROBLEM TO BE SOLVED: To provide a dicing sheet with a protective film forming layer, which enables simple manufacturing of a semiconductor chip having a highly uniform thickness and excellent printing precision and which has excellent expandability.;SOLUTION: A dicing sheet with a protective film forming layer comprises: a laminated sheet having a base film and a heat-resistant film; a protective film formation layer formed on an inner peripheral part of a surface of the heat-resistant film; and adhesive layers formed on outer peripheral parts of the surface of the heat-resistant film. The heat-resistant film has a melting point of above 130°C or has no melting point. The heat-resistant film has thermal shrinkage from -1% to +1% in heating at 130°C for two hours.;COPYRIGHT: (C)2013,JPO&INPIT
机译:解决的问题:提供一种具有保护膜形成层的切割片,其能够简单地制造具有高度均匀的厚度和优异的印刷精度并且具有优异的可扩展性的半导体芯片。形成层包括:具有基膜和耐热膜的层压片;和在耐热膜的表面的内周部形成有保护膜形成层。粘接剂层形成在耐热膜的表面的外周部。耐热膜的熔点高于130℃或没有熔点。耐热膜在130°C下加热2小时的热收缩率从-1%到+ 1%.;版权所有:(C)2013,JPO&INPIT

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