MEMS SENSOR AND METHOD FOR MANUFACTURING THE SAME, AND MEMS PACKAGE INCLUDING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an MEMS sensor including functions of a magnetic sensor in one chip, and method for manufacturing the same.SOLUTION: An acceleration sensor 3, or an MEMS sensor, comprises: a device board 7 having a sensor part 8 including an X-axis sensor 16, a Y-axis sensor 17, and a Z-axis sensor 18, each of which is provided with movably supported movable electrodes; and a lid substrate 9. The lid substrate 9 detects a variation in a magnetic field in a thickness direction of the lid substrate 9 as a detected current Iby the Hall effect, when a control current (constant current) Iruns between a pair of pads P.