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MEMS sensor, method for manufacturing the same, and MEMS package including the same
MEMS sensor, method for manufacturing the same, and MEMS package including the same
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机译:MEMS传感器,其制造方法以及包括该传感器的MEMS封装
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摘要
A MEMS sensor according to the present invention includes a base substrate including a displaceably supported movable portion and a lid substrate covering the movable portion and functioning as a magnetic sensor that detects magnetism by making use of the Hall effect.
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