Non-spherical shape measuring method, shape measurement program and shape measurement device

摘要

PROBLEM TO BE SOLVED: To provide an aspherical shape measuring method, a shape measuring program, and a shape measuring device which can measure a test aspherical surface with high accuracy and at high speed.;SOLUTION: An interference fringe image is obtained by detecting interference light. A shape of a vertical incidence region 32 in which a measuring beam vertically enters a test aspherical surface in null regions 30, 31 on the interference fringe image is calculated with high accuracy. A shape of a non-vertical incidence region 33 which is a region other than the vertical incidence region in the null regions 30, 31 is calculated as a relative shape of the vertical incidence region.;COPYRIGHT: (C)2013,JPO&INPIT