首页> 外国专利> SHAPE-MEASUREMENT DEVICE, SYSTEM FOR MANUFACTURING STRUCTURAL OBJECT, SCANNING DEVICE, METHOD FOR MEASURING SHAPE, METHOD FOR MANUFACTURING STRUCTURAL OBJECT, AND SHAPE-MEASUREMENT PROGRAM

SHAPE-MEASUREMENT DEVICE, SYSTEM FOR MANUFACTURING STRUCTURAL OBJECT, SCANNING DEVICE, METHOD FOR MEASURING SHAPE, METHOD FOR MANUFACTURING STRUCTURAL OBJECT, AND SHAPE-MEASUREMENT PROGRAM

机译:形状测量设备,制造结构对象的系统,扫描设备,形状测量方法,制造结构对象的方法以及形状测量程序

摘要

In the present invention, measurements are performed with more uniform precision than achieved in the past across the entirety of a measurement region upon which a lattice pattern is projected. A shape-measurement device is provided with a light-generating unit for generating light, a projection unit for varying the radiation direction of light generated by the light-generating unit to scan light on the measurement object, a control unit for cyclically varying the intensity of light generated by the light-generating unit and controlling the light-generating unit so that the amplitude of the variation in intensity of the generated light is caused to vary according to the radiation direction, an image-capturing unit for capturing an image of the measurement object, and a measurement unit for calculating the three-dimensional shape of the measurement object on the basis of the image of the measurement object obtained by the image-capturing unit.
机译:在本发明中,在投影有格子图案的整个测量区域上以比过去更均匀的精度进行测量。形状测量装置包括:用于产生光的光产生单元;用于改变由光产生单元产生的光的辐射方向以在被测物体上扫描光的投影单元;用于周期性地改变强度的控制单元。由光产生单元产生的光并控制光产生单元,使得所产生的光的强度变化的幅度根据辐射方向而变化,图像捕获单元用于捕获光的图像。测量对象和测量单元,用于基于由图像捕获单元获得的测量对象的图像来计算测量对象的三维形状。

著录项

  • 公开/公告号WO2013133286A1

    专利类型

  • 公开/公告日2013-09-12

    原文格式PDF

  • 申请/专利权人 NIKON CORPORATION;

    申请/专利号WO2013JP56029

  • 发明设计人 TAKAHASHI AKIRA;

    申请日2013-03-05

  • 分类号G01B11/25;

  • 国家 WO

  • 入库时间 2022-08-21 16:30:50

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