Development of Measurement Method for Shape and Dimension of Micro-Components (Modification of the Original Measuring System, Calibration of the Probes and the Results of Dimensional Measurements)

摘要

In order to facilitate the advancement of micromachine technology and to encourage its use across a wider range of industrial fields, a measuring technology appears to be essential. For the development of micromachines and microfabrication technologies, it is necessary to devise a technique to measure both shape and dimensions of micro-components. Some researchs on measurement methods for micro-boreholes in the micrometer range have been reported. However, general-purpose coordinate measuring machine for both shape and dimensional metrology on micro-system components has not been realized yet. To this end, one of the authors attempted to develop a small three-dimensional shape measuring apparatus which has non-contact probe detecting proximity to the object being measured through the tunneling effect, and the results has already been reported. In this study, measurement of not only shape but also of dimensions of micro-components are attempted. A modified device and the calibration technique for micro-probes are explained in detail, and then several measurement results are shown.