Development of Measuring Method for 3D Shapes and Dimensions of Micro-components

摘要

The main conclusion obtained from this study are summarized as follows: (1) The flexure hinge equipped with piezoelectric actuators works not only as the probe over travel protection mechanism but also can be used for the precise and highspeed mode measurements. As the flexure hinge can be moved to three directions, the mechanism allows positive and negative approach of the probe to measurement sample. The displacement of the flexure hinge is measured by strain gauges. (2) For dimensional metrology on micro system components, calibration of the probe used is an essential part of the measurements. In this study probe calibration procedure using master test ball with known diameter was described in detail, and depth and width for the micro grooves were measured. (3) Quartz oscillators for watches were applied to the probe system, which can be used for non-conductive measurement samples. A glass sphere diameter of 1 mm is used for the measurement sample, and the result shows the validity of the new quartz oscillator probing system.