Crystalline silicon solar cell manufacturing method, solar cell module manufacturing method, crystalline silicon solar cell, and solar cell module

摘要

In this invention, it is providing the manufacturing method of the crystalline silicon solar cell with high conversion efficiency and the light-incidence surface processed precisely. A first transparent electrode layer forming step for forming the first transparent electrode layer 6 and a back electrode layer forming step for forming a back electrode layer 11 mainly composed of copper on substantially the entire surface on the second main surface side. After the first transparent electrode layer forming step and the back electrode layer forming step, at least the first transparent electrode layer 6 on the first main surface side, and at least the second transparent electrode layer 10 and the back electrode layer 11 on the second main surface side. And an insulating treatment step for forming the insulating region 30 so as to eliminate the short circuit between the first main surface and the insulating treatment step at a position within 3 mm from the side surface of the outer peripheral portion of the one conductivity type single crystal silicon substrate 2. From the side, there is a step of irradiating laser light over the entire circumference of the outer peripheral portion of the first main surface.