Method of determining the three-dimensional distribution of the Raman spectrum of the silica glass crucible, the method for manufacturing a silicon single crystal

摘要

PROBLEM TO BE SOLVED: To provide a method of determining three-dimensional distribution of Raman spectrum of a silica glass crucible highly precisely.;SOLUTION: A method of determining three-dimensional distribution of Raman spectrum comprises steps of: moving an internal range-finding part in a non-contact manner along the inner surface of a silica glass crucible; irradiating the inner surface of the silica glass crucible with a laser beam in an oblique direction from the internal range-finding part; measuring reflected light of the laser beam by a laser displacement gauge, varying a distance between the internal range-finding part and the inner surface and an emission direction of the laser beam so that two peaks can be observed, and measuring an inner surface distance between the internal range finding part and the inner surface according to the position of the peak on the inner surface side out of the two peaks; obtaining the three-dimensional shape of the inner surface of the silica glass crucible by associating three-dimensional coordinates of respective measuring points with the inner surface distance; and measuring the Raman spectra at the plural measurement points on that three-dimensional shape, and thus determining the three-dimensional distribution of the Raman spectrum.;COPYRIGHT: (C)2016,JPO&INPIT