METHOD FOR DETERMINING THREE-DIMENSIONAL DISTRIBUTION OF RAMAN SPECTRUM IN SILICA GLASS CRUCIBLE AND METHOD FOR PRODUCING SILICON SINGLE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide a method for determining the three-dimensional distribution of raman spectra in a silica glass crucible with high precision.;SOLUTION: The method for determining the three-dimensional distribution of raman spectra in a silica glass crucible comprises steps of: moving an inner distance measurement unit in a non-contact manner along an inner surface of the silica glass crucible; at a plurality of measurement points on a moving path, emitting a laser beam from the inner distance measurement unit in a direction oblique to the inner surface of the silica glass crucible; detecting the inner surface reflection reflected from the inner surface, thereby measuring the inner surface distance between the inner distance measurement unit and the inner surface; correlating three-dimensional coordinates at individual measurement points with the inner surface distance, thereby determining the three-dimensional shape of the inner surface of the silica glass crucible; and, at a plurality of measurement points on the three-dimensional shape, measuring the raman spectra from the inner surface, thereby determining the three-dimensional distribution of the raman spectra from the inner surface.;COPYRIGHT: (C)2013,JPO&INPIT