Template fabrication of nano-imprint lithography method and system

摘要

The choice of (T _b and _{T t} or /) the thickness of the substrate template and / or control of (P _b and P _t / or) the back pressure of the template and the substrate or / and templates through the selection of material stiffness and / or control lateral strain ratio and horizontal strain between the substrate and the (d _t / d _b) are set forth.