首页> 外国专利> CARBON NANOFIBERS WITH SHARP TIP ENDS AND A CARBON NANOFIBERS GROWTH METHOD USING A PALLADIUM CATALYST

CARBON NANOFIBERS WITH SHARP TIP ENDS AND A CARBON NANOFIBERS GROWTH METHOD USING A PALLADIUM CATALYST

机译:尖头碳纳米管和使用钯催化剂的碳纳米管生长方法

摘要

The present invention relates to a carbon nanofibers growth method including (S1) depositing an alumina layer on a silicon substrate, (S2) depositing palladium on the alumina layer to form a palladium catalyst layer, and (S3) growing carbon nanofibers on the palladium catalyst layer by a chemical vapor deposition (CVD) method, and carbon nanofibers vertically grown on an alumina layer-deposited silicon substrate, the carbon nanofibers having tip ends with a radius of curvature less than or equal to 5 nm, a diameter less than or equal to 50 nm, a length more than or equal to 1 mm, and a length-diameter aspect ratio more than or equal to 50,000.
机译:碳纳米纤维的生长方法技术领域本发明涉及一种碳纳米纤维的生长方法,该方法包括:(S1)在硅基板上沉积氧化铝层;(S2)在氧化铝层上沉积钯以形成钯催化剂层;以及(S3)在钯催化剂上生长碳纳米纤维。通过化学气相沉积(CVD)方法形成碳层,并且碳纳米纤维垂直生长在沉积有氧化铝层的硅基板上,碳纳米纤维的末端的曲率半径小于或等于5 nm,直径小于或等于5 nm长度大于或等于50nm,长度大于或等于1mm,长度-直径纵横比大于或等于50,000。

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