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CARBON NANOFIBERS WITH SHARP TIP ENDS AND A CARBON NANOFIBERS GROWTH METHOD USING A PALLADIUM CATALYST
CARBON NANOFIBERS WITH SHARP TIP ENDS AND A CARBON NANOFIBERS GROWTH METHOD USING A PALLADIUM CATALYST
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机译:尖头碳纳米管和使用钯催化剂的碳纳米管生长方法
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摘要
The present invention relates to a carbon nanofibers growth method including (S1) depositing an alumina layer on a silicon substrate, (S2) depositing palladium on the alumina layer to form a palladium catalyst layer, and (S3) growing carbon nanofibers on the palladium catalyst layer by a chemical vapor deposition (CVD) method, and carbon nanofibers vertically grown on an alumina layer-deposited silicon substrate, the carbon nanofibers having tip ends with a radius of curvature less than or equal to 5 nm, a diameter less than or equal to 50 nm, a length more than or equal to 1 mm, and a length-diameter aspect ratio more than or equal to 50,000.
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