Carbon nanofibers with sharp tip structure and carbon nanofibers growth method using of palladium catalyst

摘要

The present invention relates to a growing method of carbon nanofibers, and carbon nanofibers vertically grown on an alumina layer-deposited silicon substrate, wherein the growing method of carbon nanofibers comprises the steps of: (S1) depositing an alumina layer on a silicon substrate; (S2) depositing palladium on the alumina layer to form a palladium catalyst layer; and (S3) growing carbon nanofibers on the palladium catalyst layer by a chemical vapor deposition (CVD) method. In addition, the carbon nanofibers have a tip having a curvature radius of less than or equal to 5 nm, the diameter of less than or equal to 50 nm, the growth length of more than or equal to 1 mm, and the growth length-diameter aspect ratio of more than or equal to 50,000.;COPYRIGHT KIPO 2016