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CARBON NANOFIBERS WITH SHARP TIP, AND GROWING METHOD OF CARBON NANOFIBERS USING PALLADIUM CATALYST

机译:尖锐的碳纳米粉及使用钯催化剂的碳纳米粉的生长方法

摘要

The present invention relates to a growing method of carbon nanofibers, and carbon nanofibers vertically grown on an alumina layer-deposited silicon substrate, wherein the growing method of carbon nanofibers comprises the steps of: (S1) depositing an alumina layer on a silicon substrate; (S2) depositing palladium on the alumina layer to form a palladium catalyst layer; and (S3) growing carbon nanofibers on the palladium catalyst layer by a chemical vapor deposition (CVD) method. In addition, the carbon nanofibers have a tip having a curvature radius of less than or equal to 5 nm, the diameter of less than or equal to 50 nm, the growth length of more than or equal to 1 mm, and the growth length-diameter aspect ratio of more than or equal to 50,000.;COPYRIGHT KIPO 2016
机译:本发明涉及一种碳纳米纤维的生长方法,以及在氧化铝层沉积的硅衬底上垂直生长的碳纳米纤维,其中碳纳米纤维的生长方法包括以下步骤:(S1)在硅衬底上沉积氧化铝层; (S2)在氧化铝层上沉积钯,形成钯催化剂层; (S3)通过化学气相沉积(CVD)法在钯催化剂层上生长碳纳米纤维。此外,碳纳米纤维的尖端的曲率半径小于或等于5 nm,直径小于或等于50 nm,生长长度大于或等于1 mm,且生长长度为-直径纵横比大于或等于50,000。; COPYRIGHT KIPO 2016

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