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METHODS OF DETECTING STRESSES, METHODS OF TRAINING COMPACT MODELS, METHODS OF RELAXING STRESSES, AND COMPUTING SYSTEMS
METHODS OF DETECTING STRESSES, METHODS OF TRAINING COMPACT MODELS, METHODS OF RELAXING STRESSES, AND COMPUTING SYSTEMS
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机译:检测应力的方法,训练紧缩模型的方法,松弛应力的方法和计算系统
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摘要
A method of detecting stress of an integrated circuit including first and second patterns formed from different materials may comprise: determining one or more stress detection points of the first pattern; dividing a region including a first stress detection point of the one or more stress detection points into a plurality of divided regions; calculating areas of the second pattern at the divided regions; and/or detecting a stress level applied to the first stress detection point of the first pattern by the second pattern based on the areas of the second pattern at the divided regions.
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