METHOD OF DETECTING STRESS METHOD OF TRAINING A COMPACT MODEL METHOD OF RELAXING STRESS AND COMPUTING SYSTEM

摘要

In a method for detecting stress in an integrated circuit including first and second patterns formed of different materials, at least one stress detection point of the first pattern is determined, and a region including the stress detection point is It is divided into a plurality of divided regions, the areas of the second pattern in the plurality of divided regions are respectively calculated, and the stress detection point is based on the areas of the second pattern in the plurality of divided regions. The stress level with respect to the first pattern by the second pattern is detected. Accordingly, the stress detection of the integrated circuit can be quickly performed, and a full-chip stress simulation that detects the stress in the entire area of the integrated circuit can be performed.