SEMICONDUCTOR MANUFACTURING APPARATUS, DIAGNOSTIC SYSTEM FOR SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

A semiconductor manufacturing apparatus capable of stable operation includes a processing chamber where a wafer is treated, a vacuum pump that is coupled with the processing chamber and evacuates the processing chamber, a monitor that measures the drive state of the vacuum pump, and an exhaust assisting device that is arranged on the exhaust side of the vacuum pump, in which the monitor measures the drive state of the vacuum pump in a state the vacuum pump and the exhaust assisting device are driven.