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Method for manufacturing wafer-level fan-out package

机译:晶圆级扇出封装的制造方法

摘要

Provided are a semiconductor package and a method for manufacturing a semiconductor package. The method for manufacturing a wafer-level fan-out package includes attaching semiconductor chips sawed to have a predetermined size to one surface of a wafer at predetermined intervals, forming a first passivation layer on surfaces of the semiconductor chips and the wafer, forming a redistribution layer electrically connected to the semiconductor chips on portions of an upper surface of the first passivation layer, forming a second passivation layer on the upper surface of the first passivation layer and surfaces of portions of the redistribution layer, forming external connection terminals on portions of the redistribution layer in which the second passivation layer has not been formed, and performing sawing along package boundary lines (sawing lines) and polishing the wafer to be removed such that lower surfaces of the semiconductor chips are exposed.
机译:提供一种半导体封装件和用于制造半导体封装件的方法。用于制造晶片级扇出封装的方法包括:以预定的间隔将锯切成具有预定尺寸的半导体芯片附接到晶片的一个表面;在半导体芯片和晶片的表面上形成第一钝化层;形成重新分布。在第一钝化层的上表面的一部分上电连接到半导体芯片的层,在第一钝化层的上表面和重分布层的部分表面上形成第二钝化层,在第一钝化层的一部分上形成外部连接端子。再形成层,其中未形成第二钝化层,并且沿着封装边界线(锯切线)进行锯切并抛光要去除的晶片,从而露出半导体芯片的下表面。

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