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Use of Vacuum Chucks to Hold a Wafer or Wafer Sub-Stack
Use of Vacuum Chucks to Hold a Wafer or Wafer Sub-Stack
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机译:使用真空吸盘固定晶圆或晶圆子堆叠
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摘要
Techniques are described for holding a wafer or wafer sub-stack to facilitate further processing of the wafer of sub-stack. In some implementations, a wafer or wafer sub-stack is held by a vacuum chuck in a manner that can help reduce bending of the wafer or wafer sub-stack.
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