首页> 外国专利> Electronic device including a switch element in which a metal nitride layer has a nitrogen concentration increasing as a closer distance from a switching layer, and method for fabricating the same

Electronic device including a switch element in which a metal nitride layer has a nitrogen concentration increasing as a closer distance from a switching layer, and method for fabricating the same

机译:包括开关元件的电子设备及其制造方法,该电子设备包括其中金属氮化物层的氮浓度随着距开关层的距离的增加而增加的开关元件。

摘要

An electronic device includes a switch element. The switch element includes a first electrode including a first metal nitride which is conductive, a second electrode, a switching layer interposed between the first electrode and the second electrode, and a first barrier layer which is interposed between the first electrode and the switching layer and includes a second metal nitride which is insulative, wherein a metal in the first metal nitride is the same as a metal in the second metal nitride, and a metal-to-nitrogen bonding ratio of the first metal nitride is different from a metal-to-nitrogen bonding ratio of the second metal nitride.
机译:电子设备包括开关元件。开关元件包括:第一电极,其包括导电的第一金属氮化物;第二电极;介于第一电极和第二电极之间的开关层;以及介于第一电极和开关层之间的第一势垒层,并且包括绝缘的第二金属氮化物,其中第一金属氮化物中的金属与第二金属氮化物中的金属相同,并且第一金属氮化物的金属-氮键比不同于金属-氮键比第二金属氮化物的-氮键合率。

著录项

  • 公开/公告号US9231199B2

    专利类型

  • 公开/公告日2016-01-05

    原文格式PDF

  • 申请/专利权人 SK HYNIX INC.;

    申请/专利号US201414273431

  • 发明设计人 KEE-JEUNG LEE;WAN-GEE KIM;

    申请日2014-05-08

  • 分类号H01L29/74;H01L45;G06F12/08;G06F13/16;

  • 国家 US

  • 入库时间 2022-08-21 14:27:42

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