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DEFINED DOSING ATMOSPHERIC TEMPERATURE AND PRESSURE VAPOR DEPOSITION SYSTEM.

机译:定义的剂量大气温度和压力蒸气沉积系统。

摘要

A closed chemical introduction system used to deliver active ingredients in liquid chemical to a chemical vapor deposition system includes a robust, moisture-free cartridge containing a defined dose of liquid chemical. The cartridge is placed on a mounting slot specially configured to receive the cartridge. Upon initiating the system, a first linear mechanical actuator securely holds the cartridge in the slot, while an extraction lance attached to a second linear mechanical actuator punctures the cartridge from the bottom, extracts the liquid chemical and delivers it to a vaporization chamber. The vaporization chamber evaporates the liquid chemical and delivers the vapors containing the active ingredients to the chemical vapor deposition system. The chemical vapor deposition system may include a treatment chamber, a conveyor, a compressed clean air system to provide separate treatment compartments within the chamber, a moisture system, a chemical vapor system, and a neutralization system to neutralize harmful byproducts.
机译:用于将液态化学药品中的活性成分输送到化学气相沉积系统的封闭式化学药品导入系统包括一个坚固,无湿气的药筒,其中装有规定剂量的液态化学药品。盒带放置在专门配置为容纳盒带的安装插槽中。在启动系统时,第一线性机械致动器将药筒牢固地保持在插槽中,而连接到第二线性机械致动器的抽气喷枪则从底部刺穿药筒,提取液体化学品并将其输送到汽化室。蒸发室蒸发液体化学品,并将包含活性成分的蒸气输送至化学气相沉积系统。化学气相沉积系统可包括处理室,输送机,在室内提供单独处理室的压缩清洁空气系统,水分系统,化学气相系统和中和有害副产物的中和系统。

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