A flip-chip packaging-based miniature methane sensor and a manufacturing method therefor. For the methane sensor, first, a MEMS process is employed for processing and manufacturing a monolithic high-temperature heater (1), a monolithic methane gas detector (2), and an ambient temperature detector (3), and then the monolithic high-temperature heater (1) and the monolithic methane gas detector (2) are formed into one integral miniature methane sensor in the form of a laminated structure by means of a flip-chip packaging process. The monolithic high-temperature heater (1) is independently heated to a high temperature of 500 °C or more. The monolithic methane gas detector (2) independently detects a temperature drop caused by the emergence of methane and by a change in concentration. A measuring circuit of the detector and a circuit of the monolithic high-temperature heater (1) are independent of each other and do not affect each other. The manufacturing process for the sensor is compatible with a CMOS process and has a low power consumption, high sensitivity, and extended service life.
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