SILICON HEATER-BASED MEMS METHANE SENSOR, MANUFACTURING METHOD FOR SAME, AND APPLICATIONS THEREOF

摘要

A silicon heater-based microelectromechanical systems (MEMS) methane sensor and a manufacturing method therefor, related to methane sensors and manufacturing methods therefor, and specifically related to a methane sensor employing a MEMS processing technique, a manufacturing method for the sensor, and a methane detection method therefor. The methane sensor employs a common monocrystalline silicon wafer to process a silicon heater (1011). The silicon heater (1011) also serves as a methane-sensitive component and obviates the need for a catalyst carrier and a catalyst material. A processing process for the methane sensor is compatible with a CMOS process, provides the advantage of being inexpensive if produced by mass, and allows batch calibration. The methane sensor has the characteristics of having a low power consumption, high sensitivity, and fast response rate, preventing methane detection from being affected when oxygen is deficient, and being free from effects brought forth by a catalyst, such as carbon deposition and poisoning.