ROLL-TO-ROLL GRAVURE PRINTING BASED THIN FILM TRANSISTOR MANUFACTURING METHOD, THIN FILM TRANSISTOR BACKPLANE MANUFACTURING METHOD, AND BACKPLANE PRESSURE SENSOR AND SMART FLOOR MANUFACTURING METHOD

摘要

The present invention relates to manufacturing a 100% printed thin film transistor backplane that can be mass-produced at a low cost using gravure printing (R2R and R2P gravure printing) equipment and a sensor array. In the manufacturing of a TFT backplane using gravure printing equipment, when roll-to-roll type equipment is used, the backplane is manufactured by printing source and drain electrodes, an insulation layer, an active layer, and a gate electrode on a flexible substrate such that they are overlaid with each other, and when roll-to-plate type equipment is used, the backplane is manufactured by coating an active layer on a flexible substrate and then printing source and drain electrodes, an insulation layer, and a gate electrode thereon such that they are overlaid with each other. According to the present invention, by applying a gravure printing process that has more advantages than an existing lithography, etching, or a high-temperature process, it is possible to perform a low-temperature atmospheric process, simplify large-area printing and a manufacturing method thereof, and achieve high productivity and low-cost production.