MANUFACTURING METHOD OF ROLL-TO-ROLL GRAVURE PRINTED THIN FILM TRANSISTOR, THIN FILM TRANSISTOR BACKPLANE, BACKPLANE PRESSURE SENSOR AND SMART SHEET

摘要

The present invention relates to the manufacture of a 100% printed thin film transistor backplane that can be mass-produced at a low cost by using gravure printing (R2R and R2P gravure printing) equipment and a sensor array. In the manufacture of a TFT backplane using gravure printing equipment, when roll-to-roll type equipment is used, the backplane is manufactured by overlapping and printing source and drain electrodes, an insulation layer, an active layer, and a gate electrode on a flexible substrate, and when roll-to-plate type equipment is used, the backplane is manufactured by coating an active layer on a flexible substrate and then overlapping and printing source and drain electrodes, an insulating layer, and a gate electrode. According to the present invention, by applying a gravure printing process that has more advantages than an existing lithography, etching, or a high-temperature process, it is possible to perform a low-temperature atmospheric process, simplify large-area printing and a manufacturing method thereof, and achieve high productivity and low-cost production.