首页> 外国专利> SOLUTION AND METHOD FOR REMOVAL OF GROUP III-V ELEMENT OXIDE, SOLUTION FOR TREATMENT OF GROUP III-V ELEMENT COMPOUND, SOLUTION FOR PREVENTING OXIDATION OF GROUP III-V ELEMENT, SOLUTION FOR TREATMENT OF SEMICONDUCTOR SUBSTRATE, AND METHOD FOR PRODUCTION OF SEMICONDUCTOR SUBSTRATE PRODUCT

SOLUTION AND METHOD FOR REMOVAL OF GROUP III-V ELEMENT OXIDE, SOLUTION FOR TREATMENT OF GROUP III-V ELEMENT COMPOUND, SOLUTION FOR PREVENTING OXIDATION OF GROUP III-V ELEMENT, SOLUTION FOR TREATMENT OF SEMICONDUCTOR SUBSTRATE, AND METHOD FOR PRODUCTION OF SEMICONDUCTOR SUBSTRATE PRODUCT

机译:去除III-V族元素氧化物的解决方案和方法,用于处理III-V族元素化合物的解决方案,用于防止III-V族元素氧化的解决方案,用于处理半导体基质的解决方案以及用于生产半导体基质产品的方法

摘要

Provided are a solution for the removal of, a solution for preventing the oxidation of, and a solution for the treatment of a group III-V element oxide, each solution comprising an acid and a mercapto compound. Also provided is a method for using each of the solutions. Further provided are a solution for the treatment of a semiconductor substrate, the solution comprising an acid and a mercapto compound, and a method for the production of a semiconductor substrate product, the method using the solution.
机译:提供用于除去III-V族元素氧化物的溶液,用于防止其氧化的溶液和用于处理III-V族元素氧化物的溶液,每种溶液均包含酸和巯基化合物。还提供了一种使用每种解决方案的方法。还提供了用于处理半导体衬底的溶液,该溶液包含酸和巯基化合物,以及用于生产半导体衬底产品的方法,该方法使用该溶液。

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