SENSOR FOR FILM THICKNESS MONITORING DEVICE, FILM THICKNESS MONITORING DEVICE PROVIDED WITH SAME, AND METHOD FOR MANUFACTURING SENSOR FOR FILM THICKNESS MONITORING DEVICE

摘要

[Problem] To provide a sensor for a film thickness monitoring device and a film thickness monitoring device provided with the same, whereby the precision of film thickness measurement can be enhanced by a simple configuration and a highly precise film formation rate can be realized. [Solution] The present invention is provided with: an SC-Cut quartz oscillator having a quartz plate which is θ-rotated about the Z axis and φ-rotated about the X axis in an orthogonal coordinate system of an X axis, a Y axis, and a Z axis which are the quartz crystal axes, and having θ and φ whereby the frequency deviation of the quartz oscillator at a temperature of 10-170°C is ±20 ppm or less; and a sensor head for retaining the quartz oscillator, the sensor head not having a cooling means for cooling the quartz oscillator.