SENSOR FOR FILM THICKNESS MONITORING DEVICE FILM THICKNESS MONITORING DEVICE PROVIDED WITH SAME AND METHOD FOR MANUFACTURING SENSOR FOR FILM THICKNESS MONITORING DEVICE

摘要

Provided are a sensor for a film thickness monitoring apparatus and a film thickness monitoring apparatus using the same, which can realize a high precision deposition rate by improving the measurement accuracy of film thickness by a simple structure. In the quadrature coordinate system X-axis, Y-axis and Z-axis, which are quartz crystal axes, the quartz plate is rotated about the Z-axis about the Z-axis and rotated about the X-axis and the frequency deviation at the temperature of the quartz crystal at 10 to 170 ° C is ± An SC-Cut quartz crystal vibrator having? And? That is 20 ppm or less, and a sensor head having no cooling means for holding the quartz crystal and cooling the quartz crystal.