Film thickness monitoring device sensor, film thickness monitoring device including the same, and method for manufacturing film thickness monitoring device sensor

摘要

The present invention provides a film thickness monitoring device sensor and a film thickness monitoring device using the same, which can improve the film thickness measurement accuracy with a simple configuration and realize a highly accurate film formation rate. A quartz crystal plate having a quartz crystal plate rotated by θ around the Z axis and rotated by φ around the X axis in the orthogonal coordinate system X-axis, Y-axis, and Z-axis, which are crystal crystal axes, and the temperature of the crystal resonator is 10 to 10. An SC-Cut crystal resonator having θ and φ with a frequency deviation at 170 ° C. of ± 20 ppm or less, and a sensor head that holds the crystal resonator and does not have cooling means for cooling the crystal resonator are provided. [Selection] Figure 3