MANUFACTURING METHOD OF GRANULAR POLYSILICON AND FLUIDIZED BED REACTOR USED FOR SAME

摘要

The present invention relates to a manufacturing method of granular polysilicon and a fluidized bed reactor used for the same. According to the present invention, the method is capable of stably operating by effectively removing a silicon fine particle which is a byproduct when manufacturing granular polysilicon by using a fluidized bed reactor, and manufacturing polysilicon with improved quality by minimizing an amount of residual hydrogen gas with respect to a polysilicon particle.;COPYRIGHT KIPO 2016