MANUFACTURE OF GRANULAR POLYSILICON FROM TRICHLOROSILANE IN AN INTERNALLY CIRCULATING FLUIDIZED BED REACTOR

摘要

A lab scale internally circulating fluidized bed (ICFB) with a centrally located draft tube was designed to make polysilicon from trichlorosilane. Experimental results and evaluations showed that particle circulation could carry enough heat for reaction and effectively decrease wall deposition. Well grown granular polysilicon was obtained in a stable fluidization state and particle circulation rate.