FOREIGN SUBSTANCE REMOVAL APPARATUS FOREIGN SUBSTANCE REMOVAL METHOD SEPARATION APPARATUS FOREIGN SUBSTANCE DETECTION METHOD AND FOREIGN SUBSTANCE DETECTION APPARATUS

摘要

An apparatus for removing at least one foreign substance includes a detection unit detecting the at least one foreign substance adhered to a holding surface of a suction holding unit configured to suck and hold a substrate, a removal unit removing the at least one foreign substance adhered to the holding surface using fluid, and a movement mechanism configured to move the detection unit and the removal unit.