FOREIGN SUBSTANCE REMOVAL APPARATUS AND FOREIGN SUBSTANCE DETECTION APPARATUS
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机译:异物清除装置和异物检测装置
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摘要
An apparatus for removing at least one foreign substance includes a detection unit detecting the at least one foreign substance adhered to a holding surface of a suction holding unit configured to suck and hold a substrate, a removal unit removing the at least one foreign substance adhered to the holding surface using fluid, and a movement mechanism configured to move the detection unit and the removal unit.
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