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Semiconductor component having improved robustness

机译:具有增强的耐用性的半导体组件

摘要

Semiconductor component (100), comprising:a semiconductor body (40), comprising:– a vertical direction, which defines a first surface (101);– a drift region (4) is of a first conductivity type, which is under the first surface (101) is arranged and a first maximum dopant concentration; and– a semiconductor layer (7) from the first conductivity type with a to the first maximum dopant concentration lower, second maximum dopant concentration, wherein the semiconductor layer (7) to the drift region (4) and under the drift region (4) is arranged,the semiconductor body (40) in a vertical cross section, further comprising:– a first body region (5) of a second conductivity type, the to the drift region (4), wherein a source region (8) from the first conductivity type to the first body region (5) and between the first surface (101) and the first body region (5) is arranged;– a vertical trench (51) extending from said first surface (101) at least up to the semiconductor layer (7) extends, at the source region (8), the first body region (5) and the drift region (4) and an insulated gate electrode (2) comprises;– a first contact (10a) with a first smallest width (w1) at the first surface (101) and in a low-impedance contact with the source region (8) and the first body region (5);– a second body region (5) of the second conductivity type, the a pn - transition only with the drift region (4); and– a second contact (10b) in a low-impedance contact with the second body region (5) and with a on the first surface (101) second smallest width (w2), which is greater than the first smallest width (w1).
机译:半导体部件(100),包括:半导体本体(40),包括:-垂直方向,其限定了第一表面(101);-漂移区(4)具有第一导电类型,在第一导电类型下方布置表面(101)和第一最大掺杂剂浓度;以及-从第一导电类型到第一最大掺杂剂浓度较低的半导体层(7),第二最大掺杂剂浓度较低,其中半导体层(7)到漂移区(4)并在漂移区(4)下方在垂直截面中布置半导体本体(40),该半导体本体(40)进一步包括:–第二导电类型的第一本体区域(5),其到漂移区域(4),其中来自该第一本体区域(5)的源极区域(8)。在第一表面区域(101)和第一表面区域(5)之间设置第一导电类型至第一主体区域(5); –垂直沟槽(51),从所述第一表面(101)至少延伸至半导体层(7)在源区(8)上延伸第一体区(5)和漂移区(4),并且绝缘栅电极(2)包括; –具有最小第一接触的第一接触(10a)第一表面(101)处的宽度(w 1 ),并且与源极区域(8)和第一BOD处于低阻抗接触y区域(5); –第二种导电类型的第二体区域(5),其中pn-仅在漂移区域(4)处过渡; –与第二主体区域(5)低阻抗接触的第二接触(10b),并且在第一表面(101)上的第二最小宽度(w 2 )较大,比第一个最小宽度(w 1 )大。

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