An optical waves front manipulator, the projection lens system with such an optical waves front manipulator and microlithographic apparatus with such a projection objective

摘要

An optical waves front manipulator, with a first and a second optical component (12, 14), which along an optical axis (16) are arranged behind one another and a media sealing cavity (26), which in the direction of the optical axis (16) at least in part by the first and second optical component (12, 14) is limited, with the media-tight cavity (26) on the side by a first end (28) and one of the first end (28) opposite second end (32) is limited, with at the first end (28) a fluid inlet (36) for supplying a second heat exchange medium in the media-tight cavity (26) is arranged, on the second end face (32) a to the fluid inlet (36) via the media-tight cavity (26) of fluid composite media outlet (42) for the removal of the second heat exchange medium is arranged, whereby the fluid inlet (36) to produce at least one particle beam (38) of the heat exchanger medium a effusivquelle (73) and / or an aerodynamic lens.