Shafts front measuring device, the projection objective with such a measuring device and with such a measuring device of cooperating optical waves front manipulator

摘要

Shafts front measuring device for measurement of a wave front in a projection lens system (12) for microlithography, with a moiré patterns, - grid arrangement (14), which is an object gratings (16) and an image gratings (18), which are designed in an object plane (20) or an image plane (22) of the projection objective (12) to be arranged, wherein the object gratings (16) and the image gratings (18) are matched to one another in such a manner true to scale, in order to provide a moire pattern - superposition pattern of an image (24) of the object grid (16) on the image plane (22) and the image gratings (18), that the moiré patterns, - grid arrangement (14) is designed in such a way around the moiré patterns, - superposition pattern for a plurality of field points of an object field (26) in the object plane (20) and / or of an image field (28) in the image plane (22) at the same time to produce.