CONTROL METHOD OF WAFER TRANSPORT SECTION AND LOAD PORT IN EFEM

摘要

PROBLEM TO BE SOLVED: To provide a control method of a wafer transport section and a load port in an EFEM capable of protecting a wafer surface against oxidation or pollution, by keeping a clean environment in a container.SOLUTION: A control method of a wafer transport section and a load port in an EFEM includes: a step of fixing a container to a placing table of the load port; a first purification step of connecting the bottom nozzles of the load port to a plurality of bottom holes formed in the bottom face of the container placed on the placing table while closing a main opening, and introducing purification gas into the container and discharging gas from the container via the bottom nozzles; a connection step of stopping the introduction of the purification gas from the bottom nozzles, and connecting the container and a wafer transport chamber airtightly by opening the main opening; and wafer transport step of transporting a wafer from the container to a processing chamber through the opened main opening and wafer transport chamber, and then transporting the wafer from the processing chamber to the container through the wafer transport chamber and the opened main opening.SELECTED DRAWING: Figure 5